Low-energy (3–100 eV) electron-bombardment-induced nitridation of thin SiO2 films: physicochemical and electrical analyses

✍ Scribed by A. Glachant; V. Garcia; B. Balland; J.C. Bureau; C. Plossu; J.C. Dupuy; A. Straboni

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 470 KB
• Volume: 238
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(94)90644-0