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Leakage current study of Si1−xCx embedded source/drain junctions

✍ Scribed by E. Simoen; B. Vissouvanadin; N. Taleb; M. Bargallo Gonzalez; P. Verheyen; R. Loo; C. Claeys; V. Machkaoutsan; M. Bauer; S. Thomas; J.P. Lu; R. Wise

Book ID
103819342
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
469 KB
Volume
254
Category
Article
ISSN
0169-4332

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📜 SIMILAR VOLUMES

Stress analysis of Si1−xGex embedded sou
Stress analysis of Si1−xGex embedded source/drain junctions
✍ M. Bargallo Gonzalez; E. Simoen; N. Naka; Y. Okuno; G. Eneman; A. Hikavyy; P. Ve 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 974 KB

The purpose of this paper is to evaluate the impact of the geometry of embedded Si 1Àx Ge x source/drain junctions on the stress field. Stress simulations were performed using TSUPREM4 2D software to further investigate the elastic strain relaxation as a function of Si 1Àx Ge x alloy active size, in