✦ LIBER ✦
Strain mapping of tensiley strained silicon transistors with embedded Si[sub 1ây]C[sub y] source and drain by dark-field holography
✍ Scribed by HuÌe, Florian; HyÌtch, Martin; Houdellier, Florent; Bender, Hugo; Claverie, Alain
- Book ID
- 121243047
- Publisher
- American Institute of Physics
- Year
- 2009
- Tongue
- English
- Weight
- 603 KB
- Volume
- 95
- Category
- Article
- ISSN
- 0003-6951
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