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Germanium content dependence of the leakage current of recessed SiGe source/drain junctions

โœ Scribed by Eddy Roger Simoen; Mireia Bargallo Gonzalez; Geert Eneman; Peter Verheyen; Aldo Benedetti; Hugo Bender; Roger Loo; Cor Claeys


Book ID
106397578
Publisher
Springer US
Year
2007
Tongue
English
Weight
255 KB
Volume
18
Category
Article
ISSN
0957-4522

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