Factors Influencing the Leakage Current in Embedded SiGe Source/Drain Junctions

✍ Scribed by Simoen, E.; Gonzalez, M.B.; Vissouvanadin, B.; Chowdhury, M.K.; Verheyen, P.; Hikavyy, A.; Bender, H.; Loo, R.; Claeys, C.; Machkaoutsan, V.; Tomasini, P.; Thomas, S.; Lu, J.P.; Weijtmans, J.W.; Wise, R.

• Book ID: 114619127
• Publisher: IEEE
• Year: 2008
• Tongue: English
• Weight: 266 KB
• Volume: 55
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2007.914843