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Processing factors influencing the leakage current in shallow junction diodes for deep submicro-meter CMOS

✍ Scribed by L. Grau; E. Augendre; E. Simoen; R. Rooyackers; C. Claeys; G. Badenes; A. Romano-Rodriguez


Book ID
110299509
Publisher
Springer US
Year
2001
Tongue
English
Weight
521 KB
Volume
12
Category
Article
ISSN
0957-4522

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