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Laser annealing of thin buried amorphous layers in silicon

✍ Scribed by Götz, G. ;Geiler, H. D. ;Wagner, M. ;Heinig, K. H. ;Woittenneck, H.


Publisher
John Wiley and Sons
Year
1981
Tongue
English
Weight
313 KB
Volume
65
Category
Article
ISSN
0031-8965

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