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Intermediate crystallization of amorphous layers of silicon at pulsed laser annealing

✍ Scribed by Balandin, V. Yu. ;Dvurechenskii, A. V. ;Aleksandrov, L. N.

Publisher: John Wiley and Sons
Year: 1988
Tongue: English
Weight: 491 KB
Volume: 110
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2211100113

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