𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Kinetics of chemical vapor deposition of tungsten carbide

✍ Scribed by C.Michael Kelly; Diwakar Garg; Paul N. Dyer


Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
490 KB
Volume
219
Category
Article
ISSN
0040-6090

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Chemical vapor deposition of tungsten ox
✍ Rein U. Kirss; Lamartine Meda πŸ“‚ Article πŸ“… 1998 πŸ› John Wiley and Sons 🌐 English βš– 117 KB πŸ‘ 1 views

Crystalline and amorphous thin films of tungsten(VI) oxide can be prepared by chemical vapor deposition using a variety of volatile precursors below 500 Β°C. Deposition parameters for preparation of WO 3 films from tungsten hexacarbonyl [W(CO) 6 ], tungsten hexafluoride (WF 6 ), tungsten ethoxides [W