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ChemInform Abstract: Chemical Vapor Deposition of Tungsten Carbide, Molybdenum Carbide Nitride, and Molybdenum Nitride Films.

✍ Scribed by T. NAKAJIMA; T. SHIRASAKI

Publisher: John Wiley and Sons
Year: 2010
Weight: 31 KB
Volume: 28
Category: Article
ISSN: 0931-7597
DOI: 10.1002/chin.199743026

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