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[Japan Soc. Applied Phys 2003 Symposium on VLSI Technology. Digest of Technical Papers - Kyoto, Japan (10-12 June 2003)] 2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407) - Fabrication of body-tied FinFETs (Omega MOSFETs) using bulk Si wafers

✍ Scribed by Park, T.; Choi, S.; Lee, D.H.; Yoo, J.R.; Lee, B.C.; Kim, J.Y.; Lee, C.G.; Chi, K.K.; Hong, S.H.; Hynn, S.J.; Shin, Y.G.; Han, J.N.; Park, I.S.; Chung, U.I.; Moon, J.T.; Yoon, E.; Lee, J.H.

Book ID: 127278173
Publisher: Japan Soc. Applied Phys
Year: 2003
Tongue: Japanese
Weight: 232 KB
Category: Article
ISBN-13: 9784891140335
DOI: 10.1109/vlsit.2003.1221122

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