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[Japan Soc. Applied Phys 2003 Symposium on VLSI Technology. Digest of Technical Papers - Kyoto, Japan (10-12 June 2003)] 2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407) - Strained FIP-SOI (finFET/FD/PD-SOI) for sub-65 nm CMOS scaling

✍ Scribed by Fu-Liang Yang, ; Hou-Yu Chen, ; Chien-Chao Huang, ; Chun-Hu Ge, ; Ke-Wei Su, ; Cheng-Chuan Huang, ; Chang-Yun Chang, ; Da-Wen Lin, ; Chung-Cheng Wu, ; Jaw-Kang Ho, ; Wen-Chin Lee, ; Yee-Chia Yeo, ; Diaz, C.H.; Mong-Song Liang, ; Sun, J.Y.-C.; Chenming Hu,

Book ID: 120942475
Publisher: Japan Soc. Applied Phys
Year: 2003
Tongue: Japanese
Weight: 207 KB
Category: Article
ISBN-13: 9784891140335
DOI: 10.1109/VLSIT.2003.1221123

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