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[Japan Soc. Applied Phys 2003 Symposium on VLSI Technology. Digest of Technical Papers - Kyoto, Japan (10-12 June 2003)] 2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407) - Cost-effective production using electron projection lithography for 65-nm node SoC and beyond

✍ Scribed by Yamashita, H.; Nakajima, K.; Amemiya, I.; Kawata, S.; Nakatsuka, S.; Kimura, I.; Fujiwara, T.; Yamada, Y.; Fujii, K.; Yamabe, M.

Book ID: 126612772
Publisher: Japan Soc. Applied Phys
Year: 2003
Weight: 259 KB
Category: Article
ISBN-13: 9784891140335
DOI: 10.1109/VLSIT.2003.1221079

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