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[Japan Soc. Applied Phys 2003 Symposium on VLSI Technology. Digest of Technical Papers - Kyoto, Japan (10-12 June 2003)] 2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407) - HfO/sub 2/ and lanthanide-doped HfO/sub 2/ MIM capacitors for RF/mixed IC applications

✍ Scribed by Sun Jung Kim, ; Byung Jin Cho, ; Ming-Fu Li, ; Chunxiang Zhu, ; Chin, A.; Dim-Lee Kwong,

No coin nor oath required. For personal study only.

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