Issues of laser plasma sources for soft x-ray projection lithography

✍ Scribed by L. Shmaenok; F. Bijkerk; E. Louis; A. van Honk; M.J. van der Wiel; Yu. Platonov; A. Shevelko; A. Mitrofanov; H. Frowein; B. Nicolaus; F. Voβ; R. Désor

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 371 KB
• Volume: 23
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(94)90139-2