✦ LIBER ✦

Calibration of an excimer laser-plasma source for x-ray lithography

✍ Scribed by ICE Turcu; JR Maldonado; IN Ross; H Shields; P Trenda; D Batani; P Fluck; H Goodson

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

X-ray lithography with laser-plasma sour

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Issues of laser plasma sources for soft

✍ L. Shmaenok; F. Bijkerk; E. Louis; A. van Honk; M.J. van der Wiel; Yu. Platonov; 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 371 KB

Plasma focus as a radiation source for x

✍ J. Eberle; H. Krompholz; R. Lebert; W. Neff; R. Noll 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 279 KB

X-ray lithography with efficient picosec

✍ I.C.E. Turcu; I.N. Ross; A. Hening; M. Steyer; B. Soom; J.G. Watson; P. Herman 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 522 KB

Conversion efficiency of laser radiation

✍ M. Kühne; H.-C. Petzold 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 506 KB

X-ray lithography using a KrF laser-plas

✍ Edmond Turcu; Gillian Davis; Malcolm Gower; Fergus O'Neill; Martin Lawless 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 298 KB