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Conversion efficiency of laser radiation into soft x-ray radiation of laser produced plasmas for x-ray lithography

✍ Scribed by M. Kühne; H.-C. Petzold

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 506 KB
Volume: 3
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(85)90069-3

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