✦ LIBER ✦

X-ray lithography with efficient picosecond KrF laser-plasma source at 1nm wavelength

✍ Scribed by I.C.E. Turcu; I.N. Ross; A. Hening; M. Steyer; B. Soom; J.G. Watson; P. Herman

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

X-ray lithography using a KrF laser-plas

✍ Edmond Turcu; Gillian Davis; Malcolm Gower; Fergus O'Neill; Martin Lawless 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 298 KB