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X-ray lithography using a KrF laser-plasma source at hν ≈ 1 keV

✍ Scribed by Edmond Turcu; Gillian Davis; Malcolm Gower; Fergus O'Neill; Martin Lawless


Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
298 KB
Volume
6
Category
Article
ISSN
0167-9317

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