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Plasma focus as a radiation source for x-ray lithography

✍ Scribed by J. Eberle; H. Krompholz; R. Lebert; W. Neff; R. Noll

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 279 KB
Volume: 3
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(85)90075-9

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Plasma Focus generators (PFGs) are the most powerful and effective sources generating simultaneously short bursts of X-rays and fast neutrons. They are distinguished by small size of emitting area ($1 mm) and short burst duration (o100 ns). That is why they are very perspective for investigating dyn