Negative resist dose characteristics measurements by laser plasma soft x-ray sources

✍ Scribed by V.P. Avtonomov; Yu.G. Geonjian; A.V. Orlov; G.V. Slizkov; L.K. Subbotin; A.M. Checkmarev

• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 606 KB
• Volume: 3
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(85)90077-2