Surface hydrogen and growth mechanisms o
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Akitaka Yoshigoe; Shinya Hirano; Tsuneo Urisu
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Article
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1998
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John Wiley and Sons
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English
β 96 KB
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Surface hydrogen and growth mechanisms are investigated for synchrotron radiation (SR)assisted gas source molecular beam epitaxy (SR-GSMBE) using Si 2 H 6 on the Si(100) surface in the low-temperature region. The surface silicon hydrides (deuterides) are monitored in situ during the epitaxial growth