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Study of nucleation in chemically grown epitaxial silicon films using molecular beam techniques. II. Nucleation rate measurements and effect of oxygen on initial growth behaviour: B A Joyce et al,Phil Mag, 15 (138), June 1967, 1167–1187


Publisher
Elsevier Science
Year
1967
Tongue
English
Weight
240 KB
Volume
17
Category
Article
ISSN
0042-207X

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