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IR laser-induced process for chemical vapor deposition of polyselenocarbosilane films

✍ Scribed by Magna Santos; Luis Díaz; Markéta Urbanová; Dana Pokorná; Zdeněk Bastl; Jan Šubrt; Josef Pola

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
471 KB
Volume
76
Category
Article
ISSN
0165-2370

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