Laser-induced chemical vapor deposition of chromium films from chromiumhexacarbonyl using a KrF excimer laser

✍ Scribed by R. Nowak; L. Konstantinov; P. Hess

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 413 KB
• Volume: 36
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(89)90912-4