✦ LIBER ✦
In-situ Auger electron spectroscopy of silicon thin films fabricated using ArF excimer laser-induced chemical vapor deposition and the oxidation process
✍ Scribed by Katsuhiko Mutoh; Shigeru Takeyama; Yuka Yamada; Takeo Miyata
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 387 KB
- Volume
- 79-80
- Category
- Article
- ISSN
- 0169-4332
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