✦ LIBER ✦
IR and UV laser-induced chemical vapor deposition: Chemical mechanism for a-Si:H and Cr (O,C) film formation
✍ Scribed by Peter Hess
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 948 KB
- Volume
- 46
- Category
- Article
- ISSN
- 1386-1425
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