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IR laser-induced co-decomposition of trisilane and thiirane for deposition of polycarbosilthiane films

✍ Scribed by Josef Pola; Markéta Urbanová; Magna Santos; Luis Díaz; Jan Šubrt

Book ID: 104019507
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 737 KB
Volume: 81
Category: Article
ISSN: 0165-2370
DOI: 10.1016/j.jaap.2007.11.008

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