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Chemical vapour deposition of germanium-containing films by IR laser-induced decomposition of ethoxy(trimethyl)germane

✍ Scribed by Radek Fajgar; ZdeněK Bastl; Jaroslav Tláskal; Josef Pola

Publisher
John Wiley and Sons
Year
1995
Tongue
English
Weight
536 KB
Volume
9
Category
Article
ISSN
0268-2605

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