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Investigation of the microstructure, chemical composition and lateral growth kinetics of TiN films deposited by laser-induced chemical vapour deposition

✍ Scribed by A.J. Silvestre; M.L.G.F. Paramês; O. Conde


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
349 KB
Volume
241
Category
Article
ISSN
0040-6090

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