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IR laser-induced decomposition of tetravinylsilane for chemical vapour deposition of Si/C/H materials

✍ Scribed by Vladislav Dřínek; Zdeněk Bastl; Jan Šubrt; Roger Taylor; Josef Pola

Book ID
104176221
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
386 KB
Volume
35
Category
Article
ISSN
0165-2370

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