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IR laser-induced co-decomposition of gaseous trisilane and carbon disulfide

✍ Scribed by Josef Pola; Dana Pokorná; Jan Šubrt; Panos Papagiannakopoulos

Book ID: 108155152
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 713 KB
Volume: 81
Category: Article
ISSN: 0165-2370
DOI: 10.1016/j.jaap.2007.11.009

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## Abstract Summary: The laser irradiation at 193 nm of a gaseous mixture of carbon disulfide and ethene induces the copolymerization of both compounds and affords the chemical vapour deposition of a C/S/H polymer, the composition of which indicates the reaction between two to three CS~2~ molecules