𝔖 Bobbio Scriptorium
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Ion implantation into LiNbO3

✍ Scribed by G. Götz; H. Karge


Publisher
Elsevier Science
Year
1983
Weight
701 KB
Volume
209-210
Category
Article
ISSN
0167-5087

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Implantations of Xe +, Ar + and N + ions at room temperature cause radiation damage, volume expansion and near-surface decomposition in LiNbO 3. Precipitates of Li20 are formed in surface regions when exposed to the atmosphere. Amorphization induced by heavy damage is observed in the ionimplanted re