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High definition surface micromachining of LiNbO3 by ion implantation

โœ Scribed by M. Chiarini; G.G. Bentini; M. Bianconi; P. De Nicola

Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
748 KB
Volume
268
Category
Article
ISSN
0168-583X

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Effects of ion implantation on surface c
Effects of ion implantation on surface composition and enhanced etching in LiNbO3
โœ Shao Tianhao; Jiang Xinyuan; Shang Wei; Feng Xiqi ๐Ÿ“‚ Article ๐Ÿ“… 1991 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 392 KB

Implantations of Xe +, Ar + and N + ions at room temperature cause radiation damage, volume expansion and near-surface decomposition in LiNbO 3. Precipitates of Li20 are formed in surface regions when exposed to the atmosphere. Amorphization induced by heavy damage is observed in the ionimplanted re