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Observation of voids formed by annealing in LiNbO3 implanted with Cu ions

โœ Scribed by K. Ijima; N. Mitsui; A. Ho; J. Yamanaka; S. Taniguchi; Y. Saito

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
796 KB
Volume
257
Category
Article
ISSN
0168-583X

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The X-cut, Y-propagation LiNbO 3 crystals were implanted by 2.8 MeV P รพ ions with doses of $1 ร‚ 10 14 ions/cm 2 at room temperature. Planar optical waveguides were formed by P + implantation at doses of 1 ร‚ 10 14 , 2 ร‚ 10 14 , 3 ร‚ 10 14 and 4 ร‚ 10 14 ions/cm 2 . Contrary to high-dose ion-implanted w