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Ion implantation into concave polymer surface

✍ Scribed by N. Sakudo; T. Shinohara; S. Amaya; H. Endo; S. Okuji; N. Ikenaga


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
198 KB
Volume
242
Category
Article
ISSN
0168-583X

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Nitrogen plasma immersion ion implantation (PIII) was applied to Pebax thin films and plates using doses ranging from 5 β€’ 10 14 to 10 17 ions/cm 2 at applied voltages of 5, 10, 20 and 30 kV. The analysis of the Pebax structure after implantation was performed using FTIR ATR, Raman, UV-vis transmissi