Plasma immersion ion implantation of Pebax polymer
β Scribed by A. Kondyurin; P. Volodin; J. Weber
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 465 KB
- Volume
- 251
- Category
- Article
- ISSN
- 0168-583X
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β¦ Synopsis
Nitrogen plasma immersion ion implantation (PIII) was applied to Pebax thin films and plates using doses ranging from 5 β’ 10 14 to 10 17 ions/cm 2 at applied voltages of 5, 10, 20 and 30 kV. The analysis of the Pebax structure after implantation was performed using FTIR ATR, Raman, UV-vis transmission spectra, tensile and AFM contact mode data. The carbonization and depolymerisation processes were observed in the surface layer of Pebax. It was found, that graphitic-and diamond-like structures in Pebax are formed at PIII treatment of 30 kV applied voltage. AFM measurement data showed that the hardness of the Pebax surface layer increased sharply at PIII treatment with a dose higher then 10 16 ions/cm 2 . The bulk mechanical properties of the Pebax film after PIII remained unchanged.
π SIMILAR VOLUMES
Plasma immersion ion implantation (PIII), using bias voltages of 5, 10, 15 and 20 kV in an argon plasma and fluences in the range of 2 Γ 10 14 -2 Γ 10 16 ions/cm 2 , was applied to 100 nm polystyrene films coated on silicon wafer substrates. The etching kinetics and structural changes induced in the