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Nitrogen ion implantation into SiO2

✍ Scribed by S.C. Gupta; B.L. Sharma; V.V. Agashe

Publisher: Elsevier Science
Year: 1980
Weight: 143 KB
Volume: 10
Category: Article
ISSN: 0376-4583
DOI: 10.1016/0376-4583(80)90062-x

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