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Nitrogen implantation into polyimide

✍ Scribed by V. Švorčík; R. Endršt; V. Rybka; E. Arenholz; V. Hnatowicz; F. Černý


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
312 KB
Volume
31
Category
Article
ISSN
0014-3057

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✦ Synopsis


The structure of polyimide (Upilex R) implanted with 90 keV N+ ions to the doses from 1 x lOI to IO"CIII-~ were studied by i.r. spectroscopy. Electrical sheet conductivity was also measured using standard two point technique and surface polarity was determined from the measurement of contact angle. By ion implantation to the dose of 1 x lO"cm-*, the polymer conductivity was increased by 10 orders of magnitude and the surface polarity was shown to lx inversely proportional to the implanted dose. The degradation reaction by which the imide group is transformed into amine group is described. The measurements of resistivity vs temperature dependence indicate charge transport via variable range hopping mechanism.


📜 SIMILAR VOLUMES


Degradation of polyimide by implantation
✍ V. Svorcík; V. Rybka; V. Hnatowicz; I. Miček; O. Jankovskij; R. Öchsner; H. Ryss 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 198 KB 👁 2 views

Polyimide (PI) samples were irradiated with 200 keV Ar / ions to fluences from 5 1 10 13 -1 1 10 17 cm 02 and the concentration depth profiles of implanted Ar atoms as well as of carbon and oxygen atoms of the polymer matrix were determined using the Rutherford backscattering technique. The surface