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Ion-Implanted Planar Optical Waveguides in Nd:MgO:LiNbO3

✍ Scribed by Meng, Ming-Qi ;Lu, Fei ;Wang, Ke-Ming ;Lui, Xiang-Dong ;Meng, Xian-Lin ;Shen, Ding-Yu

Publisher: John Wiley and Sons
Year: 1997
Tongue: English
Weight: 153 KB
Volume: 161
Category: Article
ISSN: 0031-8965
DOI: 10.1002/1521-396x(199706)161:2<543::aid-pssa543>3.0.co;2-t

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The X-cut, Y-propagation LiNbO 3 crystals were implanted by 2.8 MeV P þ ions with doses of $1 Â 10 14 ions/cm 2 at room temperature. Planar optical waveguides were formed by P + implantation at doses of 1 Â 10 14 , 2 Â 10 14 , 3 Â 10 14 and 4 Â 10 14 ions/cm 2 . Contrary to high-dose ion-implanted w