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Ion implantation in 4H–SiC

✍ Scribed by J. Wong-Leung; M.S. Janson; A. Kuznetsov; B.G. Svensson; M.K. Linnarsson; A. Hallén; C. Jagadish; D.J.H. Cockayne

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 530 KB
Volume: 266
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.12.049

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