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Damage induced in high energy helium-implanted 4H-SiC

✍ Scribed by S. Leclerc; M.F. Beaufort; A. Declémy; J.F. Barbot


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
141 KB
Volume
242
Category
Article
ISSN
0168-583X

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