Damage induced by high energy multiply charged oxygen ions in oxide coated silicon

✍ Scribed by S.D. Dhole; S.S. Dahiwale; V.R. Kulkarni; K.A. Bogle; N.S. Shinde; V.N. Bhoraskar

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 152 KB
• Volume: 244
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2005.09.006