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Solid-state microwave annealing of ion-implanted 4H–SiC

✍ Scribed by Siddarth G. Sundaresan; Yong-lai Tian; Mark C. Ridgway; Nadeemullah A. Mahadik; Syed B. Qadri; Mulpuri V. Rao

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
237 KB
Volume
261
Category
Article
ISSN
0168-583X

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