✦ LIBER ✦
Comparison of annealing and ion implantation effects during solid state disilicide formation: F M d'Hurle et al, J Appl Phys, 53 (4), 1982, 3067–3069
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 170 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0042-207X
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