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Ion implantation-caused damage in SiC measured by spectroscopic ellipsometry

✍ Scribed by P. Petrik; E.R. Shaaban; T. Lohner; G. Battistig; M. Fried; J. Garcia Lopez; Y. Morilla; O. Polgár; J. Gyulai

No coin nor oath required. For personal study only.

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