✦ LIBER ✦

Comparative study of ion implantation caused anomalous surface damage in silicon studied by spectroscopic ellipsometry and Rutherford backscattering spectrometry

✍ Scribed by T Lohner; M Fried; N.Q Khánh; P Petrik; H Wormeester; M.A El-Sherbiny

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ion implantation-caused damage depth pro

✍ P Petrik; O Polgár; T Lohner; M Fried; NQ Khánh; J Gyulai 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 961 KB

Comparative study of ion implantation ca

✍ P. Petrik; T. Lohner; M. Fried; N.Q. Khánh; O. Polgár; J. Gyulai 📂 Article 📅 1999 🏛 Elsevier Science 🌐 English ⚖ 425 KB

Ion implantation induced buried disorder

✍ T Lohner; P Petrik; O Polgár; NQ Khánh; M Fried; J Gyulai 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 312 KB

Dose-dependence of ion implantation-caus

✍ M. Fried; P. Petrik; T. Lohner; N.Q. Khánh; O. Polgár; J. Gyulai 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 218 KB

Comparative study of the effect of annea

✍ T. Lohner; W. Skorupa; M. Fried; K. Vedam; N. Nguyen; R. Grötzschel; H. Bartsch; 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 448 KB

An electron microscope study of near-sur

✍ A. Zegadi; A. Belattar; C.A. Faunce; E. Ahmed; S. Anwar; M.V. Yakushev; M. Imani 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 648 KB