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Ion bombardment of SiO2/Si and Si measured by in situ X-ray reflectivity

✍ Scribed by E. Chason; T.M. Mayer; D. McIlroy; C.M. Matzke

Book ID
113283482
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
460 KB
Volume
80-81
Category
Article
ISSN
0168-583X

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