✦ LIBER ✦

Defect evolution during ion bombardment of amorphous Si probed by in situ conductivity measurements

✍ Scribed by F. Priolo; S. Coffa; A. Battaglia

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Defect evolution in ion implanted crysta

✍ A. Battaglia; S. Coffa; F. Priolo; C. Spinella; S. Libertino 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 501 KB

Ion bombardment of SiO2/Si and Si measur

✍ E. Chason; T.M. Mayer; D. McIlroy; C.M. Matzke 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 460 KB

In situ thickness control during plasma

✍ Neitzert, H. C. ;Hirsch, W. ;Kunst, M. ;Nell, M. E. A. 📂 Article 📅 1995 🏛 The Optical Society 🌐 English ⚖ 137 KB

Degradation, amorphization, and recrysta

✍ A. Claverie; J. Beauvillain; J. Fauré; C. Vieu; B. Jouffrey 📂 Article 📅 1992 🏛 John Wiley and Sons 🌐 English ⚖ 865 KB