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Ion beam synthesis of SiC by C implantation into SIMOX(1 1 1)

✍ Scribed by R.M.S. dos Reis; R.L. Maltez; H. Boudinov

Book ID: 108224488
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 653 KB
Volume: 267
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2009.01.164

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